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From: Elaine Hunt (
Date: Mon Sep 03 2001 - 22:11:57 EEST

. Progress on nanostructuring with nanojet
Voigt, J. (Univ of Kassel)
Shi, F.
Hudek, P.
Rangelow, I.W.
Edinger, K.
Source: Journal of Vacuum Science and Technology B: Microelectronics and
Nanometer Structures, v18, n6, Nov, 2000 American Inst of Physics,
Woodbury, NY, USA, p 3525-3529, ISSN: 0734-211X CODEN: JVTBD9
Abstract: Nanojet technology, a high fidelity pattern generation and
microfabrication method using scanning micro-nano nozzle, is described.
Using three experiments, the fundamental principles of the nanotechnology
were proved. The resolution of the etching process was found out by the
diameter of the nozzle. In English. 2 Refs. EI2001025490350.

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Elaine T. Hunt, Director
Laboratory to Advance Industrial Prototyping
Clemson University 206 Fluor Daniel Bldg.
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