RP good for MEMS process

From: Ajay Mahadula (cfdd@rocketmail.com)
Date: Sat Apr 27 2002 - 18:48:28 EEST

Can anyone advise me a "commercial available" RP
device which is good for MEMS process and the price
range ? In here, MEMS means very high precision upto
10^-6~10^-9 m.

Thanks in advance.


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