Etching of CVD Silicon Carbide

Date: Mon Mar 17 2003 - 04:25:28 EET

Has anyone on the list used either a wet or dry etching process to produce fine features (2- 10 microns) in CVD SiC? If you have, please let me know how well it worked.

Al Hastbacka

This archive was generated by hypermail 2.1.7 : Sat Jan 17 2004 - 15:17:15 EET