Re: Micromachining of Silicon Carbide

From: Larry R. Dosser (
Date: Mon Mar 17 2003 - 20:14:15 EET


We have the abilitity to micromachine features as small as abotu 15
microns and perhaps a bit smaller. Is this of interest?


Larry R. Dosser
Mound Laser & Photonics Center, Inc.
(937) 865-4481 wrote:

> Does anyone on the list have experience with etching or machining of
> silicon carbide to make features of one to ten micron size?
> Regards,
> Al Hastbacka

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